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Micro-/Nanomachining

Micromilling Machine:

Nanogrinding Machine:

Femtosecond Pulsed-Laser: The femtosecond laser system (Clark-MXR-CPA series) can be used for micro-/nanoscale device fabrication by using ultrashort pulse energy that minimizes any thermal damage or cracks.  Typical materials that can be machined include glass, quartz, fused-silica, polymers, and metallic materials.  The minimum feature size is as small as 200nm.

Assisted High-Precision Magnetic Suspension Stage:

Three-Axial Sputtering Machine: